Ghulghazaryan, Ruben G., Davit G. Piliposyan, Misak T. Shoyan, and Hayk V. Nersisyan. “Application of Machine Learning-Based Electrochemical Deposition Models to CMP Modeling”. Mathematical Problems of Computer Science 53 (December 10, 2021): 39–48. Accessed November 16, 2024. http://93.187.165.2/index.php/mpcs/article/view/19.